At present, domestic single crystal furnace, polycrystalline furnace equipped with a vacuum pump to slide the valve vacuum pump 2H120, slide valve vacuum pump 2H150, slide valve pump 2H70 mostly. Which clean crystal furnace still use water ring vacuum pump 2SK-6B models. Polycrystalline silicon furnace supporting vacuum pump can be customized according to the user various types of vacuum units. Single crystal furnace slide valve vacuum pump 2H70 The main performance parameters: Ultimate vacuum: 6X10-2 Extraction rate: 70L / S With power: 7.5KW Inlet diameter 80mm Exhaust diameter 76mm Water ring vacuum pump 2SK-6B The main performance parameters: Ultimate vacuum : 3300Pa Extraction rate: 6m3 / min Intake and exhaust diameter: 50mm With power: 11KW